Precision Linear Stage Family for Ultra High Vacuum Applications

June 07,2020
High Precision Linear Translation Stage Family for High Vacuum (HV) and Ultra High Vacuum (UHV) Applications

A leader in nanopositioning solutions, PI (Physik Instrumente) LP introduces a new high precision linear translation stage family for High Vacuum (HV) and Ultra High Vacuum (UHV) applications. The L-509 vacuum stage series is offered for 3 different vacuum levels: 10-6 hPa, 10-7 hPa, and 10-9 hPa.

Different Linear Motion Ranges

Linear motion ranges of 26mm, 52mm, and 102mm are available. The precision-ground ball screw and high resolution motors allow sub-micrometer resolution with excellent position repeatability up to 0.1 microns.

Different Bake-out Temperature Ranges, Different Motors

The new vacuum linear stage series was designed from the ground up for vacuum compatibility, with each component qualified to work under the specified conditions. Everything, from the base materials, nuts and bolts, encoders, cables, limit switches was selected for optimal performance.

Stage variants with closed-loop servo motors with position feedback encoders can be baked out up to 250°F (~120°C), while for the highest vacuum levels, stepper motors (open loop operation) are used. Here, bake-out temperatures of up to 300°F (~150°C) can be reached.