V-551 Family of Ultraprecision Positioning Stages

December 20, 2017
V-551 Family of Ultraprecision Positioning Stages

PI released a new precision feedback option for its linear stages equipped with direct-drive ironless 3-phase motors. The V-551 family of ultra-precision positioning stages models is equipped with precision crossed roller bearings featuring anticreep cage assist and excellent guiding accuracy (1µm straightness / flatness per 100mm).

Two types of position feedback systems are available: absolute-measuring encoders providing 2 nanometers resolution and incremental encoders providing 0.2nm resolution with effective 0.5nm minimum incremental motion at the stage platform.

Ironless linear motors are used when high dynamics needs to be combined with extremely smooth motion. They are suitable for applications where extremely constant velocity is required, such as in optics inspection, metrology, photonics, interferometry and semiconductor test equipment. The frictionless, zero-wear motor drives are also popular in fast automation applications, where reliability and maximum up-time are mission-critical.

Related Glossary Terms

  • metrology

    metrology

    Science of measurement; the principles on which precision machining, quality control and inspection are based. See precision machining, measurement.