RS-40 Rotary Stage and M-111 Linear Stages

September 23,2020
Vacuum Compatible Miniature Linear and Rotary Stages

PI’s family of miniature micro and nanopositioning stages is expanding with the new RS-40 rotary stage and M-111 linear stages as engineers gave specific consideration to material selection, use of lubricants and coatings, and outbakeing temperatures for high and ultra-high vacuum conditions.

Precision Miniature Rotary Stage for Compact Spaces

With 360 degree rotation range and 20N load capacity, the RS-40 V7 stage boasts high angular velocity of 20°/sec and minimum incremental motion and repeatability of 87 µrad. The 20mm Ø aperture allows rotation of filters and optics. The compact size makes the RS-40 rotary stage ideal for small vacuum chambers. The new RS-40 stage is powered by a special vacuum rated stepper motor and suitable for vacuum levels up to 10-7 hPa.

Compact Linear Stage and XY / XYZ Combinations

The new 110, M-111 and M-112 vacuum linear stage series provide travel ranges of 5, 15 and 25mm and are suitable for vacuum up to 10-6 hPa. The linear stages also provide a clear aperture (Ø 10mm). The miniature linear stages are powered by a closed-loop DC gear motor with an integrated encoder, and backlash-compensated leadscrew and provide sub-micrometer resolution with 0.05µm minimum incremental motion and excellent position repeatability up to 0.25 microns.