A-523 Z-Tip-Tilt

May 04,2021
Z-Tip-Tilt Nanopositioning Stage for Precision Alignment

PI’s air bearing motion product line is expanding. The new A-523 Z-Tip-Tilt low profile nano-positioning and alignment stage is based on a frictionless motion concept with air bearings and ironless 3-phase linear motors. The parallel-kinematics design with 3 linear motors and high-resolution linear encoders (1nm) combines high accuracy and force capacity with an ultra-low profile. The compact format provides a rotation range up to 2° in theta-X / theta-Y and 5mm vertical (Z travel) range with excellent dynamics (up to 1g acceleration). The 250mm diameter (10”) platform can carry loads of 8kg (~18lbs), while the low profile of only 60mm (2.4”) keeps the center of gravity down, a great advantage in dynamic applications. The A-523 can be combined with the A-361 X-Y-θ Air Bearing Alignment Stage to form a very compact and low profile 6-axis precision motion system.